Equipments

Thermal Evaporator

  1. Specification
    • Main Chamber
    • Rotary pump, Turbo pump
    • Controller
  2. Application
    • Seed Metal Deposition : Cu, Ti, Au
evaporator

Nano Technology

  1. Specification
    • Wet station
    • Five plating bath
    • Control system
    • Power spply system (DC, Pulse, Reverse pulse)
  2. Application
    • SElectroplating : Copper, Nikel, Gold
    • Electroless plating : Nikel, Gold
platingsystem

Q-7000 Contact Aligner

  1. Specification
    • Arc Lamp(200/350W)
    • Vacucum(350/500W)
    • Pressure(70psi)
  2. Application
    • PR patterning
    • Lithography
Q7000

Q-4000 UV Exposer

  1. Specification
    • Arc Lamp(200/350W)
    • Vacucum(350/500W)
    • Pressure(70psi)
  2. Application
    • PR patterning
    • Lithography
MA6

Chemical Mechanical Polisher

  1. Specification
    • Distridiam 6
    • Polishing head
    • MECAPOL P320
    • Suction unit
  2. Application
    • Metal polishing
PolishingMachine

NRL DC Sputter

  1. Specification
    • Main chamber
    • Polishing head
    • Controller
  2. Application
    • Metal evaporation: Pt, Cu, Au, Al, Ti, Cr
NRL_Sputter

Contact Angle Measurement

  1. Specification
    • Microscope
    • injector
  2. Application
    • Measure the contact angle at the surface
ContactAngle

SV-35 Video Microscope Systmems

  1. Specification
    • Microscope
  2. Application
    • Measurement of step profile
Video_Microscope

Low Vacuum Measurement

  1. Specification
    • Chamber
    • Rotary pump
  2. Application
    • Vacuum
Low_Vacuum_Measurement

Keyence – VK7500

  1. Specification
    • Microscope
  2. Application
    • Measurement of step profile (PR, metal)
    • Laser beam light source ( ~1um)
    • CCD camera
Keyence

Thermostat

  1. Specification
    • Temperature : 25℃
  2. Application
    • MMaintaning developer
Thermostat

Microscope Scanning Vibrometer

  1. Specification
    • Polytec’ measurement system of dynamic
      response of MEMS
    • Frequency range 0Hz~1MHz
    • Spatial resolutionof laser beam ~1um
    • Including Scanning Vibrometer software
  2. Application
    • Measurement of dynamic response of MEMS
    • MEMS optical charateristic measuremnt
Micrope_Scanning_Vibrometer

CoventorWare 2007 Simulator

  1. Specification
    • Advanced Designer + Analyzer Turbo
    • Advanced Designer
      Designer(2D layout, 2D import/export,
      solid model generatation, process editor, MPD,
      solid model visualization, 3D import/export)+
      Layout generators, material property export
    • Analyzer Turbo
      Analyzer Standard (MemMesh, MemElectro,
      MemMech, CoSolve-EM) plus upgradable
      with valueadded modules
  2. Application
    • MEMS device simulation
    • performance optimizated design
  3. Operator
    • (1st) Kim, Dae-Hyun
    • (2nd) Kim, Min-Woo

*Supported by EE dept.
*Installed on eeinfo server and opened to KAIST students

Coventor

LightTools Optical Simulator

  1. Specification
    • PCore Module
    • Illumination Module
    • Photorealistic Rendering
    • Data Exchange Module
    • Optimization Module
    • Advanced Physics Module
  2. Application
    • Optics Simulation
    • Optimization Design
LightTools