Professor

Prof_Photo

Professor, Jun-Bo Yoon

Director of the 3D Micro-Nano Structures Laboratory
(http://mems.kr)
Professor of Electrical Engineering
Korea Advanced Institute of Science and Technology (KAIST)
291 Daehak-ro, Yuseong-gu
Deajeon 305-701 Republic of Korea
Phone: +82-42-350-3476
Fax: +82-505-869-3476
E-mail : jbyoon AT ee.kaist.ac.kr

Google Scholar Citations profile.

 

1. Brief Biography

Jun-Bo Yoon received the B.S. (summa cum laude), M.S., and Ph.D. degrees in electrical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 1993, 1995, and 1999, respectively.

During his Ph.D. research, he worked on a high-Q micromachined inductor, which was cited as the best work on planar inductors at that time in the RF MEMS book of Gabriel Rebeiz entitled RF MEMS Theory, Design, and Technology. From 1999 to 2000, he was with the University of Michigan, Ann Arbor, as a Postdoctoral Research Fellow, during which time he invented the first movable-dielectric tunable RF MEMS capacitor which holds the record for highest Q-factor. In 2000, he returned as a Research Assistant Professor to the Department of Electrical Engineering, KAIST, where he is currently a Professor with tenure. He was at Stanford University, Stanford, CA, from 2008 to 2009 on his sabbatical leave. He has been working in the MEMS fields for 20 years. He has made contributions to the world’s smallest nanoelectromechanical switch, the invention of the 3D diffuser lithography, and high-Q RF MEMS components. He has authored and coauthored more than 200 journal and conference papers. He is the holder of 26 international and 60 Korean patents. His research interests include RF MEMS, display MEMS, and micro/nanoelectromechanical switches for solid-state memory/logic applications.

Prof. Yoon was the recipient of the Third-Place Award of the Student Paper Competition presented at the IEEE Microwave Theory and Techniques Society’s International Microwave Symposium in June 1999. He also received Excellent Teaching Awards from the Department of Electrical Engineering in 2003, 2007 and 2011, and from KAIST in 2006, respectively. He has served as a Technical Program Committee member for IEEE A-SSCC 2007, Transducers 2009, IEEE MEMS 2009, IEEE MEMS 2010, and Transducers 2011 conferences. He has been the chief Korean delegate to the World Micromachine Summit since 2011.

2. Education

  • 1989~1993: B.S. degree with Summa Cum Laude, Dept. of Electrical Engineering, KAIST, Daejeon, Korea, Thesis title: “Design of Single-Crystal Silicon Substrate Structure for Active-Matrix LCD”, Advisor: Prof. Choong-Ki Kim (Fellow, IEEE)
    • In his undergraduate research, he earned hands-on experience on KOH wet etching (bulk micromachining) of a (110)-oriented Si wafer.
  • 1993~1995: M.S. degree, Dept. of Electrical Engineering, KAIST, Daejeon, Korea, Thesis title: “Single Crystal Silicon Substrates for High Resolution Transmissive Active-Matrix LCD”, Advisor: Prof. Choong-Ki Kim (Fellow, IEEE)
    • He devised a one-sided wafer etching apparatus for KOH etching on his own.
    • His work was accepted to present orally at the Society for Information Display (SID ’95) conference which was held in Orlando, Florida in May 1995 (very rare for a Korean student to present a paper at the top display conference at that time).
  • 1995~1999: Ph.D. degree, Dept. of Electrical Engineering, KAIST, Daejeon, Korea, Thesis title: “Three-Dimensional Microstructure Technology for Microfluidic Systems and Integrated Inductors”, Advisor: Prof. Choong-Ki Kim (Fellow, IEEE)
    • He was involved in various MEMS research projects such as development of thermal inkjet printhead and development of micro gyroscope (work for Prof. Young-Ho Cho in Dept. of Mechanical Engineering) being equipped with hands-on experiences in surface and thick-metal (UV-LIGA) micromachining.
    • He invented the multi-exposure and single development (MESD) method which makes 3D microstructures in a thick photoresist vey easily (KR Patent 10-0271138, US Patent 6,423,241, IEEE International Electron Device Meeting (IEEE IEDM ’95), IEEE Journal of MEMS (IEEE JMEMS 1999, citation: 43) and established a metal electroplating system first in KAIST. Also developed was the record-high aspect-ratio thick-photoresist patterning methodology which was presented at the SPIE symposium in 1998 (citation: 15). Proudly, his method was asked by the original photoresist vendor (formerly Hoechst, now AZ Clariant) and thereby, they have changed the standard process accepting his method.
    • He presented 6 papers (all first-authored) at a single conference of the SPIE Symposium on Micromachining and Microfabrication (SPIE ’98) which was held in Santa Clara, CA in Sept. 1998.
    • His Ph.D. work on high-Q micromachined inductors gained high attention.
      • -He received the Third-Place Award of the Student Paper Competition presented at the IEEE MTT-S International Microwave Symposium (IEEE MTT-S IMS) in June 1999 (citation: 50) – thought to be the first Korean student recipient in its history.
      • -His work was introduced and cited as the best work on planar inductors in the RF MEMS book of Gabriel Rebeiz entitled RF MEMS Theory, Design, and Technology.
      • -Related works were published in Japanese Journal of Applied Physics (JJAP 1998, citation: 31), IEEE IEDM ’98 (citation: 39), IEEE MEMS ’99 (citation: 24), IEEE IEDM ’99 (citation: 46), IEEE Electron Device Letters (IEEE EDL 1999, citation: 107).
      • -Related patents were granted (KR Patent 10-0337950, 10-0368930, 10-0561048, US Patent 6,518,165).
      • -His works were featured in many articles such as “Mini mobiles,” printed in New Scientist, published weekly by Reed Business Information Ltd. (England), vol. 164, no. 2214, p. 14, 27 Nov. 1999, “3-D on-chip inductors for GHz applications,” printed in Micromachine Devices, the R&D magazine published monthly by Cahners Business Information (a division of Reed Elsevier Inc.), vol 4, no. 8, Aug. 1999, “Les inductances radiofréquences enfin intégrées?,” printed in Electronique international Hebdo, the French weekly newspaper for the electronic industry (80,000 readers), pp. 23-24, Mar. 1999, “Solenoids give new twist to IC inductors,” printed in Microwave Engineering Europe, pp. 20-21, Feb. 1999.

3. Working Experiences

  • 1999~2000: Postdoctoral Research Fellow, Dept. of EECS, University of Michigan, Ann Arbor, Michigan, under the mentorship of Prof. Clark T.-C. Nguyen (Fellow, IEEE)
    • He established a metal electroplating system first in Dept. of EECS, University of Michigan.
    • He invented the first movable-dielectric tunable RF MEMS capacitor which holds the record for highest Q-factor (US Patent 6,490,147), and he presented this work at the IEEE IEDM ’00 which was held in San Francisco, CA in Dec. 2000 (citation: 58).
    • His work was introduced as an excellent work in the RF MEMS book of Gabriel Rebeiz entitled RF MEMS Theory, Design, and Technology.
  • 2000~2002: Research Assistant Professor, Dept. of Electrical Engineering, KAIST, Daejeon, Korea
    • He continued his work on high-Q micromachined inductor (IEEE EDL 2002, citation: 92) and developed a new fabrication process for a suspended spiral inductor (IEEE Transactions on Microwave Theory and Techniques (IEEE T-MTT 2003, citation: 64).
    • He took care of Prof. Euisik Yoon’s graduate students while Prof. Euisik Yoon was on sabbatical leave, and he contributed to the 1 authored (citation: 22) and 5 coauthored papers presented at the IEEE MEMS ’02 which was held in Las Vegas, NV in Jan. 2002.
    • He made a noticeable contribution to the success of KAIST to win in the competition for the Korean government’s giant project of establishing National NanoFab Center ($100M from government + $200M from private sector, http://www.nnfc.re.kr/).
  • 2002~2005: Assistant Professor, 2005~2012: Associate Professor, 2012~Present: Professor with tenure, Dept. of Electrical Engineering, KAIST, Daejeon, Korea
    • In Nov. 2002, He established 3D Micro-Nano Structures Laboratory (http://mems.kr) and his lab has become National Research Lab. (NRL) funded by National Research Foundation (NRF) since 2011.
    • He has newly developed three noticeable courses and received four Excellent Teaching Awards from the department and KAIST, respectively.
    • His research strategy has focused on MEMS/NEMS researches for Korea-strong fields of Display, Memory, and Wireless communication.
    • He has authored and coauthored more than 200 journal and conference papers in the field of MEMS/NEMS (22 IEEE MEMS conference and 9 IEEE IEDM conference papers)
    • He is the holder of 26 international and 60 Korean patents.
    • 5 patents have been exclusively licensed to a company for mass-production (initial royalty: 100,000,000KRW, $91,000)
    • His works have been cited more than 1,800 times in technical literatures (H-index of 24).
    • 8 Ph.D. and 24 M.S. degrees have been awarded from his lab. Currently, 10 Ph.D. and 4 M.S. students are pursuing their degrees.
    • He has made contributions to the world’s smallest nanoelectromechanical switch, the invention of the 3D diffuser lithography, and high-Q RF MEMS components, and many others.
    • For details, please refer to the following parts of this CV
  • 2007~2008: Consultant, Samsung Electro-Mechanics
    • Technical consulting was provided to the company about thick-photoresist lithography and metal electroplating to make a large-area metal mold for next-generation PCB.
  • 2008~2009: Visiting Associate Professor, Dept. Electrical Engineering, Stanford University, Stanford, CA, invited by Prof. Roger T. Howe (Fellow, IEEE and Member, U.S. National Academy of Engineering)
    • He was involved in the DARPA NEMS project directed by Prof. Philip Wong and Prof. Roger Howe, conducting research with their graduate students, having a regular research meeting, participating in the DARPA review meeting, and co-authoring research papers.
    • He made contribution to the structural and fabrication process designs of the new NEMS switch.
    • Two papers have been published with their team so far.
      • - D. Lee, W. S. Lee, J. Provine, J.-O. Lee, J.-B. Yoon, R. T. Howe, S. Mitra and H.-S. P. Wong, “Titanium Nitride Sidewall Stringer Process for Lateral Nanoelectromechanical Relays,” 23rd IEEE International Conference on MEMS (IEEE MEMS ’10), Hong Kong, China, pp. 456-459, Jan. 2010.
      • - S. Chong, K. Akarvardar, R. Parsa, J.-B. Yoon, R. T. Howe, S. Mitra, and H.-S. P. Wong, “Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage,” IEEE/ACM International Conference on Computer-Aided Design (IEEE ICCAD ’09), San Jose, CA, USA, pp. 478-484, Nov. 2009.

4. Honors, Recognition, and Awards

  • Minister Award, Ministry of Education, Science and Technology (MEST) in recognition of his special service to KAIST, 2010
  • JMEMS Lapel Pin, from the Editor-in-Chief (Prof. Richard S. Muller) in recognition of his special service (high quality review) to the IEEE Journal of Microelectromechanical Systems, 2011
  • Excellent Teaching Awards, Department of Electrical Engineering, KAIST in 2004, 2007 and 2011, respectively (this award goes to only one professor throughout the department each semester).
  • Excellent Teaching Award, KAIST (35th anniversary of the opening of the school), 2006 (this award goes to 3~4 professors throughout KAIST each year)
  • Outstanding Research Award of 2007, Korea Research Foundation (KRF), 2007
  • Marquis Who’s Who in the World, 2010 Edition
  • Third-Place Award, Student Paper Competition presented at the IEEE Microwave Theory and Techniques Society’s International Microwave Symposium in June 1999.
  • Summa Cum Laude, KAIST, 1993
  • Humantech Prizes (his students), 1 Gold Prize, 4 Silver Prizes, 3 Bronze Prizes, 1 Jang Ryeo Prize received from Samsung since 2005.
  • Outstanding Paper Awards (his students), 9th Korea MEMS Conference (KMEMS ’07) in 2007, 11th Korea MEMS Conference (KMEMS ’09) in 2009, 14th Korea MEMS Conference (KMEMS ’12) in 2012.
  • Outstanding Paper Awards (his students), 14th International Display Workshop (IDW ’07) in 2007, 15th International Display Workshop (IDW ’08) in 2008.
  • Best Oral Paper Award (his student), 13th Korea MEMS Conference (KMEMS ’11) in 2011, 14th Korea MEMS Conference (KMEMS ’12) in 2012.

5. Major Research Achievements

  • Invention of the 3D Diffuser LithographyIn 2004, he invented an innovative method to make unique 3D microstructures, entitled 3D Diffuser Lithography, which can generate various kinds of rounded shape inside of a photoresist simply using the conventional contact lithography tool. The only difference from conventional lithography is the insertion of a diffuser (between the UV source and photomask) which randomizes paths of the incident UV light to form lens-like 3D latent image in a thick positive photoresist. After replication of the developed concave microlens mold onto the polydimethylsiloxane (PDMS), various kinds of microlens array (MLA) can be obtained.

    Since the original paper was published in Optics Express in Dec. 2004 (citation: 53), related works have been published in various journals with high impact factor, such as Optics Letters, Small, Soft Matter, Lab on a Chip, and Langmuir (15 Journal/14 international conference papers in total).

    A paper published in Journal of Micromechanics and Microengineering (JMM) in 2005 was selected within 3% in across all IOP articles which were accessed over 500 times.

    A paper published in Journal of Micromechanics and Microengineering (JMM) in 2008 was selected in the Top Papers of 2008.

    From this work, he received Outstanding Research Award of 2007 by Korea Research Foundation (KRF).

    He was invited to make a presentation on this research at the 14th International Display Workshop (IDW ’07), Sapporo, Japan in Dec. 2007.

    With this research, his students received Gold Prize at the 11th Samsung Humantech Paper Competition in Feb. 2005, Bronze Prize at the 13th Samsung Humantech Paper Competition in Feb. 2007, Outstanding Paper Award at the 9th Korea MEMS Conference (KMEMS ’07) in Apr. 2007, Outstanding Poster Paper Award at the 14th International Display Workshop (IDW ’07), Sapporo, Japan, Dec. 2007 and Outstanding Poster Paper Award at the 15th International Display Workshop (IDW ’08), Nigata, Japan, Dec. 2008.

    Qualcomm MEMS in San Jose, CA invited him to give presentation and he provided some FLU samples to demonstrate with their prototype of MirasolTM.

    Related patents were granted (KR Patent 10-0981313, KR Patent 10-0834415, KR Patent 10-0817101, KR Patent 10-0797778, KR Patent 10-0773588, KR Patent 10-0726737, KR Patent 10-0649937, KR Patent 10-0643684 and KR Patent 10-0634315).

    Other patents are pending (Pending US Patent 12/388,928, Pending US Patent 12/236,022, Pending US Patent 12/033,137, Pending US Patent 11/957,846, Pending US Patent 11/994,816, Pending US Patent 10/584,409, Pending KR Patent 10-2008-0111223, Pending KR Patent 10-2008-0046438, Pending KR Patent 10-2007-0117357, Pending KR Patent 10-2007-0078210 and Pending KR Patent 10-2007-0056046).

    5 patents have been exclusively licensed to a company for mass-production (initial royalty: 100,000,000KRW, $91,000)

  • Development of the World’s Smallest Nanoelectromechanical SwitchIn Mar. 2008, his group reported the smallest two-terminal NEM switch which has a drain-to-source gap of 15nm (Applied Physics Letters 2008, citation: 36). The NEM switch showed a zero leakage current and an infinite subthreshould slope, which are the very ideal switching characteristics that the current transistors seek for. It gained much attention and thereby was selected in the March 24, 2008 issue of Virtual Journal of Nanoscale Science & Technology.

    In Dec. 2009, his group reported at the IEEE IEDM ’09 an another remarkable achievement of the smallest three-terminal NEM switch which is really meaningful and practical since it has now three terminals just like a transistor. One big thing to note is the way of making the switch. So far, NEM switches have been sought by means of a bottom-up approach such as using carbon nanotube (CNT) or silicon nanowire, which is far from commercial realization. Whereas, his approach is using all the CMOS-compatible top-down approach for the first time, which is very important in the practicality sense. Also, a liquid media was introduced and investigated in the NEM switch for the first time.

    His group proposed the first non-volatile mechanical DRAM (US Patent 7,486,539) and reported it to the IEEE Trans. Electron Device in 2008.

    Related patents were granted (US Patent 7,787,276, US Patent 7,486,539, CN Patent 100552820, KR Patent 10-0980679, KR Patent 10-0857085, KR Patent 10-0818239, KR Patent 10-0810519, KR Patent 10-0717870, KR Patent 10-0651825, KR Patent 10-0621827) and pending (Pending KR Patent 10-2009-0000079, Pending KR Patent 10-2008-0088025).

    These works were featured in many articles such as “KAIST unveils DRAM using MEMS switches,” printed in Micronews, the Yole Development magazine, pp. 15, Sept. 2007 and “KAIST Unveils Nonvolatile DRAM Based on MEMS Switch,” printed in Nikkei Microdevices, June 19, 2007, and “The smallest 3-terminal nanoelectromechanical (NEM) switch,” major newspapers and the Industrial Technology Broadcasting TV in Korea in 2010.

    With this topic, he was invited to Stanford University, Stanford, CA to spend his sabbatical leave from 2008 to 2009 working with Prof. Roger Howe and Prof. Philip Wong involved in the DARPA NEMS project. Related works have been published in IEEE ICCAD ’09 and IEEE MEMS ’10.

6. Invited Talks

  • “MEMS development for Korea-strong fields of Display, Memory, and Wireless,” Research Frontier in Microtech World 2011, joint exhibition with Nano Korea 2011, Aug. 2011.
  • “Trends in MEMS technology,” Silicon Works, June 2011.
  • “Micromachine and Nano Activities in Korea,” 17th World Micromachine Summit 2011, Ras Al Khaimah, UAE, Apr. 2011.
  • “MEMS relay for power applications,” LS Industrial Systems, Co. Ltd., Oct. 2010.
  • “MEMS development for Korea-strong fields of Display, Memory, and Wireless,” Research Frontier in Microtech World 2010, joint exhibition with IEEE Nano and Nano Korea 2010, Aug. 2010.
  • “Recent Progress in MEMS-based Display,” 6th Next-generation Display Workshop, Hanyang University, May 2010.
  • “MEMS/NEMS developments for the Korea-Strong Industries of Display/Memory/Wireless,” 16th World Micromachine Summit 2010, Dortmund, Germany, Apr. 2010.
  • “Revival of the mechanical switch for DRAM-like flash memory and zero-leakage logic,” Hynix Semiconductor, Apr. 2010.
  • “MEM/NEM Switches for Display, Memory, and Logic Applications,” Kwang Woon University, Apr. 2010.
  • “The World of MEMS,” LG Innotek, Apr. 2010.
  • “Microlens Arrays Diffuser Sheet Using 3D Diffuser Lithography,” Shinwha Intertek Corp., Apr. 2010.
  • “Revival of the Mechanical Switch with Nanoelectromechanical Systems (NEMS) Technology,” Semicon Korea 2010 (the largest semiconductor industry exhibition and business conference in Korea), Feb. 2010.
  • “MEM/NEM Switches for Display, Memory, and Logic Applications,” Nanyang Technological University (NTU), Singapore, Jan. 2010.
  • “DMW-MEMS: MEMS Development for Korea-strong Fields of Display, Memory, and Wireless,” Electronics and Telecommunications Research Institute (ETRI), Dec. 2009.
  • “Display MEMS in KAIST,” LG Display, Aug. 2009.
  • “3D Diffuser Lithography and its Applications to Display Components,” Seoul National University, July 2009.
  • “DMW-MEMS: MEMS Development for Korea-strong Fields of Display, Memory, and Wireless,” LG Innotek, July 2009.
  • “Flexible and Transparent Light-guide Plate for Mobile Display Devices,” Qualcomm MEMS division, San Jose, CA, Feb. 2009.
  • “Past, Present and Prospect of the M/NEMS switches,” Guest Lecture in E310 Class, Stanford University, Stanford, CA, Jan. 2009.
  • “Retro-Mechanical Era? From MEMS to NEMS switches,” The University of Tokyo, Tokyo, Japan, Oct. 2008.
  • “Retro-Mechanical Era? From MEMS to NEMS switches,” Guest Lecture in E342 Class, Stanford University, Stanford, CA, Oct. 2008.
  • “A New Approach to Drive an AMOLED using MEMS Switches,” Flat Panel Display International (FPD International ’08), Yokohama, Japan, Oct. 2008.
  • “A New Method of Driving an AMOLED using MEMS Switches,” Samsung Mobile Display, June 2008.
  • “Digital Micromirror Display System Based on MEMS Technology,” Korea Iron & Steel Co., Ltd., June 2008.
  • “Introduction to MEMS,” Korea Polytechnic University, May, 2008.
  • “3D Diffuser Lithography and its Applications to Display Components,” Mirae Nanotech Corp., May 2008.
  • “A New Method of Driving an AMOLED using MEMS Switches,” Samsung SDI, Apr. 2008.
  • “A Novel Use of MEMS Switches in Driving AMOLED”, Society for Information Display (SID ’08), Los Angeles, CA, May 2008.
  • “DMW-MEMS: MEMS Development for Korea-strong Fields of Display, Memory, and Wireless,” University of California at Berkeley, Berkeley, CA, Dec. 2007.
  • “DMW-MEMS: MEMS Development for Korea-strong Fields of Display, Memory, and Wireless,” Stanford University, Stanford, CA, Dec. 2007.
  • “3-D Diffuser Lithography and Its Application to LCD/LED Backlight Unit and Flexible Front-light Unit,” International Display Workshop (IDW ’07), Sapporo, Japan, Dec. 2007.
  • “A MEMS TFT for Driving AMOLED,” Samsung Advanced Institute of Technology, June 2007.
  • “LCD/LED Backlight Unit with Microlens Array and A MEMS TFT for Driving AMOLED,” LG Electronics, June 2007.
  • “Next-generation Display and Optical Components Using MEMS Technology,” Samsung Digital Media (DM) Research Institute, Apr. 2007.
  • “Recent Developments in RF MEMS,” Samsung Advanced Institute of Technology, Apr. 2007.
  • “3D Diffuser Lithography and its Applications to Display Components,” Samsung Cheil Industries, Mar. 2007.
  • “Next-generation Display and Optical Components Using MEMS Technology,” Samsung Visual Display (VD) Research Institute, Mar. 2007.
  • “Mechanical Logic and Memory Using MEMS & NEMS Technology,” Future Information Storage Device Workshop, Korea University, Oct. 2006.
  • “Mechanical Logic and Memory Using MEMS & NEMS Technology,” Samsung Semiconductor Division, Sept. 2006.
  • “3D Polymer/Metal Micromachining and Its Applications,” Samsung Electro-Mechanics, July 2006.
  • “Recent Progress in RF MEMS,” the Institute of Electronics Engineers of Korea (IEEK) Conference, June 2006.
  • “MEMS-based Micro-display,” 2nd Next-generation Display Workshop, Hanyang University, Apr. 2006.
  • “3D Diffuser Lithography and its Applications to Display Components,” LG Philips LCD, Apr. 2006.
  • “3D Diffuser Lithography and its Applications to Display Components,” LG Chem, Ltd., Feb. 2006.
  • “Next-generation Micro-display Based on MEMS Technology,” LG Philips LCD Research Institute, Dec. 2005.
  • “MEMS technologies for Next-generation Display Devices,” Samsung Electro-Mechanics, Dec. 2005.
  • “Next-generation Micro-display Based on MEMS Technology,” BOE Hydis, Nov. 2005.
  • “RF MEMS Inductor,” RF MEMS Short Course, Radio Education and Research Center (RERC), Oct. 2005.
  • “Metal and Polymer Micromachining,” 1st MEMS Short Course, Busan National University, June 2005.
  • “MEMS technologies and applications at KAIST,” Samsung Mechatronics, June 2005.
  • “LCD Backlight Unit Using MEMS Technology,” Samsung LCD Division, June 2005.
  • “Development of High-Performance DLP Chip for Next-generation Digital Display,” Samsung Advanced Institute of Technology, May 2005.
  • “Development of High-Performance DLP Chip for Next-generation Digital Display,” LG Electronics, Apr. 2005.
  • “MEMS Applications to Various 3-D Optical/Electrical Devices,” LG Micron Co., Apr. 2005.
  • “RF MEMS Inductor for High-Performance RF Integrated Circuits,” MagnaChip Semiconductor, Jan. 2005.
  • “MEMS and Antennas,” IEEE AP Korea Chapter Seminar, Nov. 2004.
  • “3D Micro-Nano Structure Technology and Its Application to RF and Optical/Display MEMS,” Samsung Electro-Mechanics, Oct. 2004.
  • “MEMS for Wireless Communication,” 2nd Samsung Wireless Modem Workshop, Sept. 2004.
  • “3D Micro-Nano Structure Technology,” Korea Institute of Machinery and Materials (KIMM), July 2004.
  • “3D RF MEMS Technologies for Wireless Communications,” Samsung Electronics, Oct. 2003.
  • “3D Microstructure (MEMS) Technology for 4T’s (IT, BT, NT, ST),” Knowledge-on Semiconductor, Aug. 2003.
  • “3D RF MEMS Technology for Wireless Communications,” Tsinghua University, Beijing, China, Aug. 2003.
  • “3D-MEMS Approaches to Inductors,” Workshop on Integrated Passives, Organized by Hector J. De Los Santos, George E. Ponchak, Joachim N. Burghartz, IEEE MTT-S International Microwave Symposium (IEEE MTT-S IMS ’03), Philadelphia, PA, June 8-13, 2003.
  • “3D Microstructure (MEMS) Technology for 4T’s (IT, BT, NT, ST),” Samsung Electro-Mechanics Research Institute, Apr. 2003.

7. Technical Services

  • Chair, MEMS and Emerging Technologies Subcommittee, The 11th International Meeting on Information Display (IMID ’11), Seoul, Korea, Oct. 2011
  • JMEMS Lapel Pin was given to Prof. Yoon from the Editor-in-Chief (Prof. Richard S. Muller) in recognition of his special service (high quality review) to the IEEE Journal of Microelectromechanical Systems, 2011
  • Chief Korean Delegate, The 17th World MicroMachine Summit (MMS ’11), Ras Al Khaimah, UAE, Apr. 2011
  • Korean Delegate, The 16th World MicroMachine Summit (MMS ’10), Dortmund, Germany, Apr. 2010
  • Technical Program Committee Member and Session Chair, The 23rd IEEE International Conference on MEMS (IEEE MEMS ’10), Hong Kong, China, Jan. 2010
  • Technical Program Committee Member and Session Chair, The 22nd IEEE International Conference on MEMS (IEEE MEMS ’09), Sorrento, Italy, Jan. 2010 (sole member from Korea)
  • Technical Program Committee Member, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’11), Beijing, China, June 2011
  • Technical Program Committee Member, The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’09), Denver, Colorado, June 2009
  • Technical Program Committee Member, IEEE Asian Solid-State Circuits Conference (IEEE A-SSCC ’07), Jeju, Korea, Nov. 2007
  • Technical Program Committee Member, The 7th International Meeting on Information Display (IMID ’07), Daegu, Korea, Aug. 2007
  • Technical Program Committee Member and Session Chair, The 8th Korea MEMS Conference (KMEMS ’06), Jeju, Korea, Apr. 2006
  • Technical Program Committee Member and Session Chair, The 10th Korea MEMS Conference (KMEMS ’08), Jeju, Korea, Apr. 2008
  • Technical Program Committee Member and Session Chair, The 12th Korea MEMS Conference (KMEMS ’10), Busan, Korea, Apr. 2010
  • Session Chair, The 16th IEEE International Conference on MEMS (IEEE MEMS ’03), Kyoto, Japan, Jan. 2003
  • Session Chair, The 14th International Display Workshop (IDW ’07), Sapporo, Japan, Dec. 2007
  • Reviewer, IEEE/ASME Journal of Microelectromechanical Systems, 2004~present
  • Reviewer, IEEE Electron Device Letters, 2003~present
  • Reviewer, IEEE Transactions on Electron Devices, 2002~present
  • Reviewer, IEEE Microwave and Wireless Components Letters, 2004~2008
  • Reviewer, IEEE Transactions on Microwave Theory and Techniques, 2002
  • Reviewer, IEEE Photonics Technology Letters, 2009
  • Reviewer, Journal of Micromechanics and Microengineering (JMM), 2009~present
  • Reviewer, Microelectronics Engineering, 2007
  • Reviewer, Sensors and Actuators: A. Physical, 2008
  • Reviewer, Applied Physics B – Lasers and Optics as a rapid communication, 2009
  • Reviewer, Journal of Quantum Electronics, 2010
  • Reviewer, International Journal of Control, Automation, and Systems, 2005
  • Member, IEEE
  • He co-established and led the Korean Young MEMS special interest group (SIG) in which 50 young professors under age of 45 are working in the fields of MEMS