Hyun-Ho Yang, Chang-Hoon Han, Jeong Oen Lee and Jun-Bo Yoon “Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration” Journal of Micromechanics and Microengineering, Vol. 24, No. 6

Voltage-Controlled C-V Response Tuning in a Parallel Plate MEMS Variable Capacitor