Chang-Hoon Han, Dong-Hoon Choi, Hyun-Ho Yang, Yong-Hoon Yoon and Jun-Bo Yoon “Voltage-Controlled C-V Response Tuning in a Parallel Plate MEMS Variable Capacitor” Journal of Microelectromechanical Systems, Vol. 22, No. 6, pp. 1403-1413.

Voltage-Controlled C-V Response Tuning in a Parallel Plate MEMS Variable Capacitor